By J. Reed (auth.), K. L. Mittal (eds.)
This quantity records the lawsuits of the second one Symposium on debris on Surfaces: Detection, Adhesion and removing held as a part of the nineteenth Annual assembly of the positive Particle Society in Santa Clara, California, July 20-25, 1988. The most excellent symposium in this subject was once l geared up in 1986 and has been correctly chronicled . in response to the luck of those occasions and the excessive curiosity evinced by means of the technical group, we plan to frequently carry symposia in this subject on a biennial foundation and the subsequent one is slated for August 20-24, 1990 in San Diego, California. l As mentioned within the Preface to the 1st quantity , the subject of debris on surfaces is of paramount significance in legion of technological components. rather within the semiconductor gadget fabrication zone, all indications point out that the knowledge of the habit of debris on surfaces and their elimination will reach heightened significance within the occasions to return. because the equipment dimensions are shrinking at an sped up speed, so the benign debris of this day turns into the killer defects within the now not too far away destiny. The pace of study and improvement task within the box of debris on surfaces is especially excessive, and higher and novel methods are constantly being devised to take away smaller and smaller particles.